Alicat mass flow meters – Tezgen, Alicat distributor in Turkey

Overview

Mass flow meters

Our most versatile mass flow meters, thanks to highly sensitive, multivariable Laminar DP technology. Perfect for versatility in research environments, while offering precision and reliability for industrial applications.

Laminar DP (differential pressure) mass flow measurement technology pioneered by Alicat
98 standard (up to 130) pre-calibrated gas options – switch between gases without loss of accuracy
Measures mass flow, volumetric flow, temperature and pressure
Measurement range 0.01–100% (10,000:1 turndown)

Mass flow meters with laminar differential pressure technology

Alicat MQ Series High-Pressure Gas Mass Flow Meter

Measure flow rates at higher pressures
10 SCCM – 12,000 SLPM options
11.5–320 PSIA operating pressure
Accuracy as good as ± 0.6% of reading or ± 0.1% of full scale (whichever is greater)
Repeatability ± 0.1% of full scale

Technical specifications

Parameter
Mass flow accuracy at calibration conditions	± 0.6% of reading or ± 0.1% of full scale, whichever is greater
Bidirectional option	No additional uncertainty
Flow repeatability (2σ)	± 0.1% of full scale
Flow measurement range	0.1–100% of full scale
Temperature sensitivity	Mass flow zero shift: ± 0.01% of full scale per °C from tare temperature, per atm Mass flow span shift: ± 0.01% of reading per °C from 25 °C, per atm
Pressure sensitivity	Mass flow zero shift: ± 0.01% of full scale per atm from tare pressure Mass flow span shift: ± 0.1% of reading per atm from calibration conditions
Operating temperature range	-10…60 °C
Temperature accuracy	± 0.75 °C
Operating pressure (full scale)	320 PSIA
Pressure accuracy	Above 1 atm: ± 0.5% of reading Below 1 atm: ± 0.07 PSIA
Total volumetric uncertainty	± 0.5% of reading (additional uncertainty)
Sensor response time	< 1 ms
Typical indicator response time	< 10 ms, depending on flow rate
Typical warm-up time	< 1 s