Alicat mass flow meters – Tezgen, Alicat distributor in Turkey

Overview

Mass flow meters

Our most versatile mass flow meters, thanks to highly sensitive, multivariable Laminar DP technology. Perfect for versatility in research environments, while offering precision and reliability for industrial applications.

Laminar DP (differential pressure) mass flow measurement technology pioneered by Alicat
98 standard (up to 130) pre-calibrated gas options – switch between gases without loss of accuracy
Measures mass flow, volumetric flow, temperature and pressure
Measurement range 0.01–100% (10,000:1 turndown)

Mass flow meters with laminar differential pressure technology

Alicat M Series Gas Mass Flow Meter

Accurate measurement for most gases
0.5 SCCM – 12,000 SLPM options
11.5–160 PSIA operating pressure
Accuracy ± 0.5% of reading
Repeatability ± (0.1% of reading + 0.02% of full scale)

Technical specifications

Parameter
Mass flow accuracy	Standard accuracy: ± (0.8% of reading + 0.2% of full scale) High accuracy option (5 SCCM): ± (0.4% of reading + 0.2% of full scale)
Flow repeatability (2σ)	± (0.2% of reading + 0.02% of full scale)
Pressure accuracy	Above 1 atm: ± 0.5% of reading Below 1 atm: ± 0.07 PSIA
Flow measurement range	0.01–100% of full scale (10,000:1 turndown)
Operating pressure	11.5–160 PSIA
Pressure sensitivity	Mass flow zero and span shift: ± (0.08% of reading + 0.02% of full scale) per atm from calibration conditions
Temperature sensitivity	Mass flow zero and span shift: 0.02% of full scale per °C from 25 °C
Temperature accuracy	± 0.75 °C
Operating temperature range	-10…60 °C (ambient and gas)
Total volumetric uncertainty	± 0.1% of reading (additional uncertainty)
Sensor response time	< 1 ms
Typical indicator response time	< 10 ms, depending on flow rate
Typical warm-up time	< 1 s