Alicat mass flow meters – Tezgen, Alicat distributor in Turkey

Overview

Mass flow meters

Our most versatile mass flow meters, thanks to highly sensitive, multivariable Laminar DP technology. Perfect for versatility in research environments, while offering precision and reliability for industrial applications.

Laminar DP (differential pressure) mass flow measurement technology pioneered by Alicat
98 standard (up to 130) pre-calibrated gas options – switch between gases without loss of accuracy
Measures mass flow, volumetric flow, temperature and pressure
Measurement range 0.01–100% (10,000:1 turndown)

Mass flow meters with laminar differential pressure technology

Alicat MS Series Gas Mass Flow Meter for Corrosive Gases

130 gases, including corrosives
0.5 SCCM – 12,000 SLPM
11.5–160 PSIA
Accuracy ± 0.4% of reading and ± 0.2% of full scale

Technical specifications

Parameter
Mass flow accuracy	Standard accuracy: ± 0.8% of reading and ± 0.2% of full scale High accuracy (≥ 5 SCCM and ≤ 500 SLPM): ± 0.4% of reading and ± 0.2% of full scale
Flow repeatability (2σ)	± 0.2% of full scale
Pressure accuracy	± 0.5% of full scale
Flow measurement range	1–100% of full scale (100:1 turndown)
Operating pressure	11.5–160 PSIA
Pressure sensitivity	Mass flow zero and span shift: ± (0.08% of reading + 0.02% of full scale) per atm from calibration conditions
Temperature sensitivity	Mass flow zero and span shift: ± 0.02% of full scale per °C from 25 °C
Temperature accuracy	± 0.75 °C
Operating temperature range	-10…60 °C (ambient and gas)
Total volumetric uncertainty	± 0.1% of reading (additional uncertainty)
Sensor response time	< 1 ms
Typical indicator response time	Depends on flow rate and is user adjustable; as fast as (T63): 0.5–5 SCCM: 100–4000 ms 10 SCCM – 20 SLPM: < 10 ms 50–12,000 SLPM: 65–255 ms